Inventor
FINDERS JOZEF MARIA
NL50 patents
⚠️ This page may combine multiple inventors who share the name “FINDERS JOZEF MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
34 patentsUS6809797B2Oct 26, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV71 citations94
US6977714B2Dec 20, 2005
Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby
ASML NETHERLANDS BV16 citations92
US6795163B2Sep 21, 2004
Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby
ASML NETHERLANDS BV29 citations92
US7352435B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV26 citations91
US7961296B2Jun 14, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US7425397B2Sep 16, 2008
Method of determining an illumination profile and device manufacturing method
ASML NETHERLANDS BV16 citations84
US7359029B2Apr 15, 2008
Lithographic apparatus and method of reducing thermal distortion
ASML NETHERLANDS BV12 citations84
US7256870B2Aug 14, 2007
Method and apparatus for controlling iso-dense bias in lithography
ASML NETHERLANDS BV16 citations84
US7256873B2Aug 14, 2007
Enhanced lithographic resolution through double exposure
ASML NETHERLANDS BV12 citations83
US7307690B1Dec 11, 2007
Device manufacturing method, computer program product and lithographic apparatus
ASML NETHERLANDS BV13 citations82
US7466413B2Dec 16, 2008
Marker structure, mask pattern, alignment method and lithographic method and apparatus
ASML NETHERLANDS BV11 citations78
US7824842B2Nov 2, 2010
Method of patterning a positive tone resist layer overlaying a lithographic substrate
ASML NETHERLANDS BV6 citations74
US7316870B2Jan 8, 2008
Device manufacturing method, mask set for use in the method, data set for controlling a programmable patterning device, method of generating a mask pattern and a computer program
ASML NETHERLANDS BV7 citations74
US7961293B2Jun 14, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations71
US7670731B2Mar 2, 2010
Method for exposing a substrate and lithographic projection apparatus
ASML NETHERLANDS BV7 citations69
US7982856B2Jul 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations63
US7732110B2Jun 8, 2010
Method for exposing a substrate and lithographic projection apparatus
ASML NETHERLANDS BV1 citations61
US7655368B2Feb 2, 2010
Method for exposing a substrate and lithographic projection apparatus
ASML NETHERLANDS BV3 citations61
US7456931B2Nov 25, 2008
Device manufacturing method, computer program product and lithographic apparatus
ASML NETHERLANDS BV4 citations61
US10551736B2Feb 4, 2020
Methods for providing lithography features on a substrate by self-assembly of block copolymers
ASML NETHERLANDS BV1 citations60
US10240250B2Mar 26, 2019
Method to provide a patterned orientation template for a self-assemblable polymer
ASML NETHERLANDS BV1 citations58
US10401723B2Sep 3, 2019
Patterning device
ASML NETHERLANDS BV1 citations57
US7471375B2Dec 30, 2008
Correction of optical proximity effects by intensity modulation of an illumination arrangement
ASML NETHERLANDS BV5 citations57
US9811002B2Nov 7, 2017
Determination and application of non-monotonic dose sensitivity
ASML NETHERLANDS BV0 citations52
US9513553B2Dec 6, 2016
Methods of providing patterned epitaxy templates for self-assemblable block copolymers for use in device lithography
ASML NETHERLANDS BV1 citations52
US9513109B2Dec 6, 2016
Lithographic mask, lithographic apparatus and method
ASML NETHERLANDS BV0 citations52
US7811746B2Oct 12, 2010
Method of patterning a positive tone resist layer overlaying a lithographic substrate
ASML NETHERLANDS BV1 citations52
US10331042B2Jun 25, 2019
Method for a lithographic apparatus
ASML NETHERLANDS BV0 citations51
US9285685B2Mar 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10775705B2Sep 15, 2020
Patterning stack optimization
ASML NETHERLANDS BV0 citations49
US10732498B2Aug 4, 2020
Patterning device
ASML NETHERLANDS BV0 citations47
US9229324B2Jan 5, 2016
Methods of providing patterned templates for self-assemblable block copolymers for use in device lithography
ASML NETHERLANDS BV0 citations42
US12197120B2Jan 14, 2025
Patterning device and method of use thereof
ASML NETHERLANDS BV0 citations40
US7491478B2Feb 17, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36
FINDERS JOZEF MARIA
7 patentsUS8164741B2Apr 24, 2012
Lithographic apparatus and device manufacturing method
FINDERS JOZEF MARIA3 citations62
US8974989B2Mar 10, 2015
Lithographic mask, lithographic apparatus and method
FINDERS JOZEF MARIA0 citations51
US8786828B2Jul 22, 2014
Lithographic apparatus and device manufacturing method
FINDERS JOZEF MARIA0 citations51
US8416394B2Apr 9, 2013
Lithographic apparatus and device manufacturing method
FINDERS JOZEF MARIA0 citations51
USRE43643ESep 11, 2012
Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby
FINDERS JOZEF MARIA0 citations51
US9170502B2Oct 27, 2015
Method of optimizing a lithographic process, device manufacturing method, lithographic apparatus, computer program product and simulation apparatus
FINDERS JOZEF MARIA0 citations41
US9229336B2Jan 5, 2016
Lithographic apparatus and methods for determining an improved configuration of a lithographic apparatus
FINDERS JOZEF MARIA0 citations37
DE WINTER LAURENTIUS CORNELIUS
4 patentsUS9535341B2Jan 3, 2017
Method for a lithographic apparatus
DE WINTER LAURENTIUS CORNELIUS0 citations49
US8426088B2Apr 23, 2013
Method for a lithographic apparatus
DE WINTER LAURENTIUS CORNELIUS0 citations49
US8178263B2May 15, 2012
Method for a lithographic apparatus
DE WINTER LAURENTIUS CORNELIUS0 citations49
US8300212B2Oct 30, 2012
Device manufacturing method and lithographic apparatus
DE WINTER LAURENTIUS CORNELIUS0 citations39