Inventor
HOHN FRITZ J
US5 patents
Patents
5 patentsUS5150392ASep 22, 1992
X-ray mask containing a cantilevered tip for gap control and alignment
IBM28 citations91
US4843330AJun 27, 1989
Electron beam contactless testing system with grid bias switching
IBM35 citations91
US5057773AOct 15, 1991
Method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
IBM29 citations89
US4943769AJul 24, 1990
Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
IBM34 citations89
US4871919AOct 3, 1989
Electron beam lithography alignment using electric field changes to achieve registration
IBM18 citations79