Inventor
HORI MASAFUMI
JP24 patents
⚠️ This page may combine multiple inventors who share the name “HORI MASAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
20 patentsUS8815493B2Aug 26, 2014
Resist pattern-forming method, and radiation-sensitive resin composition
JSR CORP4 citations72
US11705331B2Jul 18, 2023
Method and composition for selectively modifying base material surface
JSR CORP0 citations62
US11370872B2Jun 28, 2022
Composition for pattern formation, and pattern-forming method
JSR CORP0 citations62
US11211246B2Dec 28, 2021
Method and composition for selectively modifying base material surface
JSR CORP0 citations62
US10950438B2Mar 16, 2021
Method and composition for selectively modifying base material surface
JSR CORP0 citations62
US9170488B2Oct 27, 2015
Resist pattern-forming method, and radiation-sensitive resin composition
JSR CORP2 citations61
US9046765B2Jun 2, 2015
Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film
JSR CORP2 citations61
US9513548B2Dec 6, 2016
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
JSR CORP2 citations60
US11460767B2Oct 4, 2022
Composition for film formation, film-forming method and directed self-assembly lithography process
JSR CORP0 citations51
US11335559B2May 17, 2022
Pattern-forming method, and composition
JSR CORP0 citations51
US10048586B2Aug 14, 2018
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
JSR CORP0 citations51
US9335630B2May 10, 2016
Pattern-forming method, and radiation-sensitive composition
JSR CORP1 citations51
US9158196B2Oct 13, 2015
Radiation-sensitive resin composition and pattern-forming method
JSR CORP1 citations51
US9034559B2May 19, 2015
Pattern-forming method, and radiation-sensitive composition
JSR CORP0 citations51
US9029067B2May 12, 2015
Resin composition for making resist pattern insoluble, and method for formation of resist pattern by using the same
JSR CORP0 citations51
US8795954B2Aug 5, 2014
Resist pattern-forming method, and radiation-sensitive resin composition
JSR CORP1 citations51
US10691019B2Jun 23, 2020
Pattern-forming method and composition
JSR CORP0 citations41
US9223207B2Dec 29, 2015
Resist pattern-forming method, and radiation-sensitive resin composition
JSR CORP0 citations40
US9164387B2Oct 20, 2015
Pattern-forming method, and radiation-sensitive resin composition
JSR CORP0 citations40
US9760004B2Sep 12, 2017
Radiation-sensitive resin composition and resist pattern-forming method
JSR CORP0 citations39