Inventor

AUTRYVE LUC VAN

FR3 patents

Patents

3 patents

US7109087B2Sep 19, 2006

Absorber layer for DSA processing

APPLIED MATERIALS INC20 citations90

US5935877AAug 10, 1999

Etch process for forming contacts over titanium silicide

APPLIED MATERIALS INC28 citations87

US7262106B2Aug 28, 2007

Absorber layer for DSA processing

APPLIED MATERIALS INC4 citations60