P

Inventor

SHIU WEI-CHENG

TW5 patents
⚠️ This page may combine multiple inventors who share the name “SHIU WEI-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIU WEI-CHENG

3 patents
US8216946B2Jul 10, 2012

Patterning method

SHIU WEI-CHENG0 citations45
US8822104B2Sep 2, 2014

Photomask

SHIU WEI-CHENG0 citations40
US8243260B2Aug 14, 2012

Lithography apparatus

SHIU WEI-CHENG0 citations30

NANYA TECHNOLOGY CORP

2 patents
US8368869B2Feb 5, 2013

Lithography apparatus with an optical fiber module

NANYA TECHNOLOGY CORP0 citations46
US7799697B2Sep 21, 2010

Patterning method in semiconductor manufacturing process including an array of rectangular blocks and filling features

NANYA TECHNOLOGY CORP1 citations46