Inventor
KAWAMURA MAKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KAWAMURA MAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
5 patentsUS9201303B2Dec 1, 2015
Photoresist composition
SUMITOMO CHEMICAL CO2 citations60
US9946157B2Apr 17, 2018
Resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations49
US9182663B2Nov 10, 2015
Photoresist composition
SUMITOMO CHEMICAL CO1 citations49
US10969685B2Apr 6, 2021
Photoresist composition
SUMITOMO CHEMICAL CO0 citations43
US8927194B2Jan 6, 2015
Chemical amplified photoresist composition
SUMITOMO CHEMICAL CO0 citations39