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Inventor
WU GUOBIAO
CN
2 patents
Patents
2 patents
US11218090B2
Jan 4, 2022
Compact piezoelectric inertial drive stage
THORLABS INC
2 citations
65
US11606045B2
Mar 14, 2023
Compact piezoelectric inertial drive stage
THORLABS INC
0 citations
44