Inventor
KAWAZU RYUJI
4 patents
Patents
4 patentsUS4609615ASep 2, 1986
Process for forming pattern with negative resist using quinone diazide compound
OKI ELECTRIC IND CO LTD30 citations90
US4801518AJan 31, 1989
Method of forming a photoresist pattern
OKI ELECTRIC IND CO LTD15 citations72
US4600684AJul 15, 1986
Process for forming a negative resist using high energy beam
OKI ELECTRIC IND CO LTD5 citations60
US4278754AJul 14, 1981
Resists and method of manufacturing semiconductor elements by using the same
OKI ELECTRIC IND CO LTD5 citations56