Inventor · disambiguated record
Ichiro Gyobu
Also filed as: GYOBU ICHIRO
4 granted patents·158 citations·filing 1980–1989
81Inventor score
Files withHITACHI LTD4
Top patents by PatentIndex Score
4 records- 0185US5062771AVacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamberHITACHI LTD·Filed 1989·Granted Nov 5, 1991·48 cites·52 claims
- 0279US4354802AVaned diffuserHITACHI LTD·Filed 1980·Granted Oct 19, 1982·42 cites·7 claims
- 0378US4835114AMethod for LPCVD of semiconductors using oil free vacuum pumpsHITACHI LTD·Filed 1987·Granted May 30, 1989·36 cites·16 claims
- 0474US4904155AVacuum pumpHITACHI LTD·Filed 1988·Granted Feb 27, 1990·32 cites·15 claims
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