Inventor
SHIRAISHI YOJI
JP2 patents
Patents
2 patentsUS5801833ASep 1, 1998
Method of producing master and working pattern plates for etching and photolithographic apparatus therefor
DAINIPPON PRINTING CO LTD19 citations80
US5500326AMar 19, 1996
Method of producing master and working pattern plates for etching and photolithographic apparatus therefor
DAINIPPON PRINTING CO LTD5 citations58