Inventor
SASANO HIROKI
US8 patents
⚠️ This page may combine multiple inventors who share the name “SASANO HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6960416B2Nov 1, 2005
Method and apparatus for controlling etch processes during fabrication of semiconductor devices
APPLIED MATERIALS INC65 citations95
US7498106B2Mar 3, 2009
Method and apparatus for controlling etch processes during fabrication of semiconductor devices
APPLIED MATERIALS INC18 citations92
US7094613B2Aug 22, 2006
Method for controlling accuracy and repeatability of an etch process
APPLIED MATERIALS INC36 citations92
US6924088B2Aug 2, 2005
Method and system for realtime CD microloading control
APPLIED MATERIALS INC19 citations92
US7482178B2Jan 27, 2009
Chamber stability monitoring using an integrated metrology tool
APPLIED MATERIALS INC8 citations83
US7262865B2Aug 28, 2007
Method and apparatus for controlling a calibration cycle or a metrology tool
APPLIED MATERIALS INC9 citations73