Inventor
CHO JUNG-HUN
KR3 patents
Patents
3 patentsUS6464794B1Oct 15, 2002
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
SAMSUNG ELECTRONICS CO LTD75 citations94
US6797109B2Sep 28, 2004
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
SAMSUNG ELECTRONICS CO LTD7 citations71
US7205194B2Apr 17, 2007
Method of fabricating a flash memory cell
SAMSUNG ELECTRONICS CO LTD6 citations60