Inventor
KO HYUNG-HO
KR20 patents
⚠️ This page may combine multiple inventors who share the name “KO HYUNG-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
14 patentsUS7176041B2Feb 13, 2007
PAA-based etchant, methods of using same, and resultant structures
SAMSUNG ELECTRONICS CO LTD32 citations92
US6565736B2May 20, 2003
Wet process for semiconductor device fabrication using anode water containing oxidative substances and cathode water containing reductive substances, and anode water and cathode water used in the wet process
SAMSUNG ELECTRONICS CO LTD42 citations92
US7318870B2Jan 15, 2008
Method of cleaning semiconductor substrate
SAMSUNG ELECTRONICS CO LTD7 citations72
US7435301B2Oct 14, 2008
Cleaning solution of silicon germanium layer and cleaning method using the same
SAMSUNG ELECTRONICS CO LTD6 citations62
US6844229B2Jan 18, 2005
Method of manufacturing semiconductor device having storage electrode of capacitor
SAMSUNG ELECTRONICS CO LTD3 citations62
US7354868B2Apr 8, 2008
Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture
SAMSUNG ELECTRONICS CO LTD4 citations61
US7262141B2Aug 28, 2007
Methods for cleaning a semiconductor substrate having a recess channel region
SAMSUNG ELECTRONICS CO LTD1 citations51
US10474034B2Nov 12, 2019
Phase shift mask
SAMSUNG ELECTRONICS CO LTD0 citations50
US9989857B2Jun 5, 2018
Photomask and method of forming the same and methods of manufacturing electronic device and display device using the photomask
SAMSUNG ELECTRONICS CO LTD0 citations50
US10042246B2Aug 7, 2018
Method of manufacturing photomask
SAMSUNG ELECTRONICS CO LTD0 citations48
US9417518B2Aug 16, 2016
Photomask and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US7989123B2Aug 2, 2011
Photomask including ion trapping layer and method of manufacturing semiconductor device using the photomask
SAMSUNG ELECTRONICS CO LTD0 citations47
US9341941B2May 17, 2016
Reflective photomask blank, reflective photomask, and integrated circuit device manufactured by using reflective photomask
SAMSUNG ELECTRONICS CO LTD0 citations46
US9122177B2Sep 1, 2015
Apparatus for cleaning photomask
SAMSUNG ELECTRONICS CO LTD1 citations46