Inventor
HAN SUNG-JAE
KR8 patents
⚠️ This page may combine multiple inventors who share the name “HAN SUNG-JAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS7527901B2May 5, 2009
Method of repairing phase shift mask
SAMSUNG ELECTRONICS CO LTD5 citations59
US9122177B2Sep 1, 2015
Apparatus for cleaning photomask
SAMSUNG ELECTRONICS CO LTD1 citations46
US7842916B2Nov 30, 2010
Method of and apparatus for analyzing ions adsorbed on surface of mask
SAMSUNG ELECTRONICS CO LTD0 citations45