P

Inventor

JEON CHAN-UK

KR12 patents
⚠️ This page may combine multiple inventors who share the name “JEON CHAN-UK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

6 patents
US7601467B2Oct 13, 2009

Method of manufacturing EUVL alternating phase-shift mask

SAMSUNG ELECTRONICS CO LTD2 citations61
US7812929B2Oct 12, 2010

Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask

SAMSUNG ELECTRONICS CO LTD0 citations50
US9798241B2Oct 24, 2017

Methods of manufacturing photomasks, methods of forming photoresist patterns and methods of manufacturing semiconductor devices

SAMSUNG ELECTRONICS CO LTD1 citations48
US9436077B2Sep 6, 2016

Method of fabricating a pellicle frame

SAMSUNG ELECTRONICS CO LTD0 citations47
US9122177B2Sep 1, 2015

Apparatus for cleaning photomask

SAMSUNG ELECTRONICS CO LTD1 citations46
US7632611B2Dec 15, 2009

Method of manufacturing rim type of photomask and photomask made by such method

SAMSUNG ELECTRONICS CO LTD0 citations39

CHOI JAE-HYUCK

2 patents
US9370805B2Jun 21, 2016

Method of megasonic cleaning of an object

CHOI JAE-HYUCK0 citations43
US8293020B2Oct 23, 2012

Method of megasonic cleaning of an object

CHOI JAE-HYUCK0 citations43

KIM JUNG-JIN

1 patent
US8404405B2Mar 26, 2013

Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame

KIM JUNG-JIN3 citations57

JEONG YUN-SONG

1 patent
US8414708B2Apr 9, 2013

Method and apparatus for cleaning photomask

JEONG YUN-SONG4 citations51

YOON YOUNG-KEUN

1 patent
US8522172B2Aug 27, 2013

Method of forming photomask using calibration pattern, and photomask having calibration pattern

YOON YOUNG-KEUN0 citations45

OH JONG-KEUN

1 patent
US8784672B2Jul 22, 2014

Photomasks and methods of manufacturing the same

OH JONG-KEUN0 citations43