Inventor
MAO CHIH-JEN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “MAO CHIH-JEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
4 patentsUS7510964B2Mar 31, 2009
Method for manufacturing semiconductor device that includes baking a dielectric layer after exposure to plasma
UNITED MICROELECTRONICS CORP0 citations47
US7909677B2Mar 22, 2011
Method of transferring a wafer
UNITED MICROELECTRONICS CORP1 citations46
US7482244B2Jan 27, 2009
Method of preventing a peeling issue of a high stressed thin film
UNITED MICROELECTRONICS CORP0 citations45
US7732009B2Jun 8, 2010
Method of cleaning reaction chamber, method of forming protection film and protection wafer
UNITED MICROELECTRONICS CORP0 citations40