Inventor
PARK DONGSUK
US9 patents
⚠️ This page may combine multiple inventors who share the name “PARK DONGSUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
6 patentsUS10705435B2Jul 7, 2020
Self-referencing and self-calibrating interference pattern overlay measurement
GLOBALFOUNDRIES INC8 citations80
US10733354B2Aug 4, 2020
System and method employing three-dimensional (3D) emulation of in-kerf optical macros
GLOBALFOUNDRIES INC2 citations71
US9633915B1Apr 25, 2017
Method of using dummy patterns for overlay target design and overlay control
GLOBALFOUNDRIES INC5 citations68
US10804170B2Oct 13, 2020
Device/health of line (HOL) aware eBeam based overlay (EBO OVL) structure
GLOBALFOUNDRIES INC0 citations51
US10483214B2Nov 19, 2019
Overlay structures
GLOBALFOUNDRIES INC0 citations48
US10103070B2Oct 16, 2018
Dynamic integrated circuit fabrication methods
GLOBALFOUNDRIES INC0 citations33