Inventor
GRANNEMAN ERNST H A
NL26 patents
⚠️ This page may combine multiple inventors who share the name “GRANNEMAN ERNST H A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT
18 patentsUS6831315B2Dec 14, 2004
Conformal thin films over textured capacitor electrodes
ASM INT128 citations99
US6686271B2Feb 3, 2004
Protective layers prior to alternating layer deposition
ASM INT245 citations99
US6861334B2Mar 1, 2005
Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition
ASM INT88 citations98
US6727169B1Apr 27, 2004
Method of making conformal lining layers for damascene metallization
ASM INT225 citations98
US6699783B2Mar 2, 2004
Method for controlling conformality with alternating layer deposition
ASM INT47 citations96
US7410355B2Aug 12, 2008
Method for the heat treatment of substrates
ASM INT60 citations95
US5294572AMar 15, 1994
Method and apparatus for depositing a layer on a substrate
ASM INT379 citations95
US5354433AOct 11, 1994
Method for producing a flow of triisobutylaluminum from liquid triisobutylaluminum containing isobutene
ASM INT340 citations94
US7754013B2Jul 13, 2010
Apparatus and method for atomic layer deposition on substrates
ASM INT20 citations92
US7153772B2Dec 26, 2006
Methods of forming silicide films in semiconductor devices
ASM INT27 citations92
US7102235B2Sep 5, 2006
Conformal lining layers for damascene metallization
ASM INT17 citations91
US7022627B2Apr 4, 2006
Method for the heat treatment of substrates
ASM INT40 citations89
US7691750B2Apr 6, 2010
Methods of forming films in semiconductor devices with solid state reactants
ASM INT13 citations83
US7427329B2Sep 23, 2008
Temperature control for single substrate semiconductor processing reactor
ASM INT7 citations74
US7276774B2Oct 2, 2007
Trench isolation structures for integrated circuits
ASM INT2 citations63
US7670944B2Mar 2, 2010
Conformal lining layers for damascene metallization
ASM INT3 citations62
US8002463B2Aug 23, 2011
Method and device for determining the temperature of a substrate
ASM INT4 citations57
US8034410B2Oct 11, 2011
Protective inserts to line holes in parts for semiconductor process equipment
ASM INT0 citations52