Inventor
TERHORST HERBERT
NL30 patents
⚠️ This page may combine multiple inventors who share the name “TERHORST HERBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
15 patentsUS10844484B2Nov 24, 2020
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
ASM IP HOLDING BV10 citations83
US10844486B2Nov 24, 2020
Semiconductor processing reactor and components thereof
ASM IP HOLDING BV8 citations83
US10480072B2Nov 19, 2019
Semiconductor processing reactor and components thereof
ASM IP HOLDING BV7 citations83
US10683571B2Jun 16, 2020
Gas supply manifold and method of supplying gases to chamber using same
ASM IP HOLDING BV8 citations81
US11404302B2Aug 2, 2022
Substrate susceptor using edge purging
ASM IP HOLDING BV4 citations71
US10605530B2Mar 31, 2020
Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
ASM IP HOLDING BV2 citations69
US12406871B2Sep 2, 2025
Substrate susceptor using edge purging
ASM IP HOLDING BV1 citations63
US12077854B2Sep 3, 2024
Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas
ASM IP HOLDING BV1 citations62
US12416081B2Sep 16, 2025
Manifolds for uniform vapor deposition
ASM IP HOLDING BV0 citations61
US11926894B2Mar 12, 2024
Reactant vaporizer and related systems and methods
ASM IP HOLDING BV0 citations52
US12366410B2Jul 22, 2025
Apparatus for processing a plurality of substrates provided with an extractor chamber
ASM IP HOLDING BV0 citations51
US11971217B2Apr 30, 2024
Batch furnace assembly and method of operating a batch furnace assembly
ASM IP HOLDING BV0 citations51
US9431238B2Aug 30, 2016
Reactive curing process for semiconductor substrates
ASM IP HOLDING BV1 citations51
US12195852B2Jan 14, 2025
Substrate processing apparatus with an injector
ASM IP HOLDING BV0 citations50
US12467140B2Nov 11, 2025
Showerhead assembly and components
ASM IP HOLDING BV0 citations47
ASM INT
5 patentsUS6902395B2Jun 7, 2005
Multilevel pedestal for furnace
ASM INT368 citations97
US7410355B2Aug 12, 2008
Method for the heat treatment of substrates
ASM INT60 citations95
US6770851B2Aug 3, 2004
Method and apparatus for the treatment of substrates
ASM INT37 citations91
US6551404B2Apr 22, 2003
Apparatus for treating a wafer
ASM INT9 citations73
US7128570B2Oct 31, 2006
Method and apparatus for purging seals in a thermal reactor
ASM INT6 citations58