P
PatentIndex
Search
Landscape
Sign in
Inventor
TRAN DUC CHINH
DE
2 patents
Patents
2 patents
US7365350B2
Apr 29, 2008
Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma
XTREME TECH GMBH
23 citations
87
US7079224B2
Jul 18, 2006
Arrangement for debris reduction in a radiation source based on a plasma
XTREME TECH GMBH
9 citations
70