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Inventor
JASCHKE VOLKER
DE
4 patents
⚠️ This page may combine multiple inventors who share the name “JASCHKE VOLKER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FROHBERG KAI
1 patent
US8338284B2
Dec 25, 2012
Stress engineering in a contact level of semiconductor devices by stressed conductive layers and an isolation spacer
FROHBERG KAI
4 citations
60
RUELKE HARTMUT
1 patent
US8415257B2
Apr 9, 2013
Enhanced adhesion of PECVD carbon on dielectric materials by providing an adhesion interface
RUELKE HARTMUT
0 citations
46
KRONHOLZ STEPHAN
1 patent
US8772843B2
Jul 8, 2014
Oxide deposition by using a double liner approach for reducing pattern density dependence in sophisticated semiconductor devices
KRONHOLZ STEPHAN
0 citations
39
LENSKI MARKUS
1 patent
US8987103B2
Mar 24, 2015
Multi-step deposition of a spacer material for reducing void formation in a dielectric material of a contact level of a semiconductor device
LENSKI MARKUS
0 citations
36