Inventor
O DWYER DAVID
NL4 patents
Patents
4 patentsUS10642172B2May 5, 2020
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV2 citations68
US11347155B2May 31, 2022
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV0 citations58
US12517441B2Jan 6, 2026
Cleaning method and associated illumination source metrology apparatus
ASML NETHERLANDS BV0 citations56
US11223181B2Jan 11, 2022
High harmonic generation radiation source
ASML NETHERLANDS BV0 citations47