Inventor
CHEN SHIH-CHIANG
TW11 patents
⚠️ This page may combine multiple inventors who share the name “CHEN SHIH-CHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS9502265B1Nov 22, 2016
Vertical gate all around (VGAA) transistors and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD938 citations98
US11374128B2Jun 28, 2022
Method and structure for air gap inner spacer in gate-all-around devices
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11120997B2Sep 14, 2021
Surface treatment for etch tuning
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations72
US12426297B2Sep 23, 2025
Method and structure for air gap inner spacer in gate-all-around devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations64
US11855220B2Dec 26, 2023
Method and structure for air gap inner spacer in gate-all-around devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12080775B2Sep 3, 2024
Semiconductor device and forming method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12033895B2Jul 9, 2024
Semiconductor devices and methods of manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12261203B2Mar 25, 2025
Semiconductor device structure with gate stack and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47