Inventor
TOMOMURA MASAOMI
JP4 patents
Patents
4 patentsUS4816237AMar 28, 1989
Process for purifying argon gas and apparatus used therefor
HITACHI LTD24 citations90
US4746332AMay 24, 1988
Process for producing high purity nitrogen
HITACHI LTD36 citations89
US4737167AApr 12, 1988
Method and apparatus for separating gas mixture
HITACHI LTD13 citations68
US4623524ANov 18, 1986
Process and apparatus for recovering inert gas
HITACHI LTD18 citations67