Inventor
SEGAWA SUMIE
JP4 patents
Patents
4 patentsUS7582182B2Sep 1, 2009
Method and apparatus for measuring electron density of plasma and plasma processing apparatus
TOKYO ELECTRON LTD14 citations92
US7339656B2Mar 4, 2008
Method and apparatus for measuring electron density of plasma and plasma processing apparatus
TOKYO ELECTRON LTD20 citations92
US6207007B1Mar 27, 2001
Plasma processing system
TOKYO ELECTRON LTD17 citations75
US7532322B2May 12, 2009
Method and apparatus for measuring electron density of plasma and plasma processing apparatus
TOKYO ELECTRON LTD6 citations72