Inventor
CONARD HARRY W
US5 patents
Patents
5 patentsUS6749103B1Jun 15, 2004
Low temperature sputter target bonding method and target assemblies produced thereby
TOSOH SMD INC108 citations96
US7114643B2Oct 3, 2006
Friction fit target assembly for high power sputtering operation
TOSOH SMD INC37 citations91
US6725522B1Apr 27, 2004
Method of assembling target and backing plates
TOSOH SMD INC45 citations91
US5009765AApr 23, 1991
Sputter target design
TOSOH SMD INC77 citations90
US7922881B2Apr 12, 2011
Sputtering target with an insulating ring and a gap between the ring and the target
TOSOH SMD INC9 citations82