Inventor
LACY MICHAEL S
US13 patents
⚠️ This page may combine multiple inventors who share the name “LACY MICHAEL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS6599765B1Jul 29, 2003
Apparatus and method for providing a signal port in a polishing pad for optical endpoint detection
LAM RES CORP104 citations97
US6953515B2Oct 11, 2005
Apparatus and method for providing a signal port in a polishing pad for optical endpoint detection
LAM RES CORP35 citations92
US6554688B2Apr 29, 2003
Method and apparatus for conditioning a polishing pad with sonic energy
LAM RES CORP37 citations92
US6809031B1Oct 26, 2004
Method for manufacturing a reclaimable test pattern wafer for CMP applications
LAM RES CORP16 citations83
US6875091B2Apr 5, 2005
Method and apparatus for conditioning a polishing pad with sonic energy
LAM RES CORP12 citations79
US6495464B1Dec 17, 2002
Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool
LAM RES CORP13 citations73
US6936133B2Aug 30, 2005
Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool
LAM RES CORP3 citations62
US6733615B2May 11, 2004
Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool
LAM RES CORP3 citations62
US6609961B2Aug 26, 2003
Chemical mechanical planarization belt assembly and method of assembly
LAM RES CORP5 citations62