Inventor
SAROV YANKO
DE7 patents
⚠️ This page may combine multiple inventors who share the name “SAROV YANKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CARL ZEISS MULTISEM GMBH
4 patentsUS10854423B2Dec 1, 2020
Multi-beam particle beam system
CARL ZEISS MULTISEM GMBH31 citations92
US11239054B2Feb 1, 2022
Multi-beam particle beam system
CARL ZEISS MULTISEM GMBH0 citations60
US12255040B2Mar 18, 2025
Multi-beam particle beam system and method for operating same
CARL ZEISS MULTISEM GMBH0 citations48
US12586749B2Mar 24, 2026
Certain improvements of multi-beam generating and multi-beam deflecting units
CARL ZEISS MULTISEM GMBH0 citations47