Inventor
IZIKSON PAVEL
IL14 patents
⚠️ This page may combine multiple inventors who share the name “IZIKSON PAVEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
6 patentsUS7873585B2Jan 18, 2011
Apparatus and methods for predicting a semiconductor parameter across an area of a wafer
KLA TENCOR TECH CORP96 citations97
US6928628B2Aug 9, 2005
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP141 citations96
US7804994B2Sep 28, 2010
Overlay metrology and control method
KLA TENCOR TECH CORP54 citations92
US7310789B2Dec 18, 2007
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP20 citations91
US7111256B2Sep 19, 2006
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP9 citations72
US7679069B2Mar 16, 2010
Method and system for optimizing alignment performance in a fleet of exposure tools
KLA TENCOR TECH CORP2 citations61
IZIKSON PAVEL
5 patentsUS8175831B2May 8, 2012
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
IZIKSON PAVEL42 citations95
US8142966B2Mar 27, 2012
Substrate matrix to decouple tool and process effects
IZIKSON PAVEL16 citations83
US9620426B2Apr 11, 2017
Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation
IZIKSON PAVEL5 citations72
US9606453B2Mar 28, 2017
Method and system for providing tool induced shift using a sub-sampling scheme
IZIKSON PAVEL4 citations72
US9651943B2May 16, 2017
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
IZIKSON PAVEL1 citations60