Inventor
MAZUR ROBERT G
US11 patents
⚠️ This page may combine multiple inventors who share the name “MAZUR ROBERT G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SOLID STATE MEASUREMENTS INC
8 patentsUS6900652B2May 31, 2005
Flexible membrane probe and method of use thereof
SOLID STATE MEASUREMENTS INC126 citations96
US6492827B1Dec 10, 2002
Non-invasive electrical measurement of semiconductor wafers
SOLID STATE MEASUREMENTS INC60 citations95
US6052653AApr 18, 2000
Spreading resistance profiling system
SOLID STATE MEASUREMENTS INC110 citations93
US5036271AJul 30, 1991
Apparatus for characterization of electrical properties of a semiconductor body
SOLID STATE MEASUREMENTS INC37 citations88
US3978622ASep 7, 1976
Lapping and polishing apparatus
SOLID STATE MEASUREMENTS INC20 citations79
US6972582B2Dec 6, 2005
Apparatus and method for measuring semiconductor wafer electrical properties
SOLID STATE MEASUREMENTS INC8 citations73
US6150832ANov 21, 2000
Noncontact capacitance measuring device
SOLID STATE MEASUREMENTS INC12 citations72
US4489521ADec 25, 1984
Apparatus for abrading workpieces, particularly semiconductor wafers
SOLID STATE MEASUREMENTS INC4 citations61