Inventor

CAVANAUGH MARY

US5 patents

Patents

5 patents

US9499721B2Nov 22, 2016

Colloidal silica chemical-mechanical polishing composition

CABOT MICROELECTRONICS CORP8 citations82

US9422456B2Aug 23, 2016

Colloidal silica chemical-mechanical polishing composition

CABOT MICROELECTRONICS CORP9 citations82

US9422457B2Aug 23, 2016

Colloidal silica chemical-mechanical polishing concentrate

CABOT MICROELECTRONICS CORP7 citations82

US9803106B2Oct 31, 2017

Methods for fabricating a chemical-mechanical polishing composition

CABOT MICROELECTRONICS CORP4 citations80

US10124464B2Nov 13, 2018

Corrosion inhibitors and related compositions and methods

CABOT MICROELECTRONICS CORP6 citations68