Inventor

LEE SOOK HYUN

KR2 patents

Patents

2 patents

US10007185B2Jun 26, 2018

Electron beam lithography method and apparatus

SAMSUNG ELECTRONICS CO LTD0 citations40

US9709893B2Jul 18, 2017

Exposure method using electron beam and substrate manufacturing method using the same

SAMSUNG ELECTRONICS CO LTD0 citations35