Inventor
HUNG YUNG-TI
TW8 patents
⚠️ This page may combine multiple inventors who share the name “HUNG YUNG-TI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS10043681B2Aug 7, 2018
Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipment
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations65
US11273470B2Mar 15, 2022
In situ cleaning apparatus and system thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US10814455B2Oct 27, 2020
Slurry feed system and method of providing slurry to chemical mechanical planarization station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9744642B2Aug 29, 2017
Slurry feed system and method of providing slurry to chemical mechanical planarization station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10500616B2Dec 10, 2019
In situ cleaning apparatus and system thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44
US9643217B2May 9, 2017
In situ clean apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44
US9789448B2Oct 17, 2017
Process for treating fluid
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations34