Inventor
KOTSUGI TADASHI
JP7 patents
Patents
7 patentsUS8993352B2Mar 31, 2015
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD43 citations93
US7554095B2Jun 30, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate
TOKYO ELECTRON LTD7 citations71
US7521687B2Apr 21, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
TOKYO ELECTRON LTD5 citations71
US8877081B2Nov 4, 2014
Etching method and etching apparatus
TOKYO ELECTRON LTD2 citations61
US9691643B2Jun 27, 2017
Etching apparatus
TOKYO ELECTRON LTD1 citations51
US7550739B2Jun 23, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
TOKYO ELECTRON LTD0 citations50
US9245764B2Jan 26, 2016
Semiconductor device manufacturing method
TOKYO ELECTRON LTD0 citations40