Inventor
YAMASHITA FUMIKO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “YAMASHITA FUMIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS8383521B2Feb 26, 2013
Substrate processing method
TOKYO ELECTRON LTD8 citations83
US9412618B2Aug 9, 2016
Pattern forming method
TOKYO ELECTRON LTD4 citations72
US9660182B2May 23, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD5 citations67
US9208997B2Dec 8, 2015
Method of etching copper layer and mask
TOKYO ELECTRON LTD2 citations62
US8877081B2Nov 4, 2014
Etching method and etching apparatus
TOKYO ELECTRON LTD2 citations61
US9882124B2Jan 30, 2018
Etching method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US9691643B2Jun 27, 2017
Etching apparatus
TOKYO ELECTRON LTD1 citations51
US10923329B2Feb 16, 2021
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations49
US9419211B2Aug 16, 2016
Etching method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations49
US9234083B2Jan 12, 2016
Method and apparatus for forming a periodic pattern using a self-assembled block copolymer
TOKYO ELECTRON LTD0 citations45
US9150969B2Oct 6, 2015
Method of etching metal layer
TOKYO ELECTRON LTD0 citations45
US9245764B2Jan 26, 2016
Semiconductor device manufacturing method
TOKYO ELECTRON LTD0 citations40