Inventor
SUEMITSU YOSHIRO
JP4 patents
Patents
4 patentsUS11164766B2Nov 2, 2021
Operating method of vacuum processing apparatus
HITACHI HIGH TECH CORP2 citations64
US8588962B2Nov 19, 2013
Vacuum processing device and method of transporting process subject member
HITACHI HIGH TECH CORP1 citations48
US9257318B2Feb 9, 2016
Operation method for vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations37
US12062564B2Aug 13, 2024
Operating method of vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations35