Inventor

UZIEL YORAM

IL48 patents

⚠️ This page may combine multiple inventors who share the name “UZIEL YORAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UZIEL YORAM

APPLIED MATERIALS ISRAEL LTD

Contaminant removal by laser-accelerated fluid

Method for charging and imaging an object

System and method for attaching a mask to a mask holder

Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system

Method and system for moving a substrate

System for inspecting and reviewing a sample

Charged particle beam source and a method for assembling a charged particle beam source

Charged particle beam source and a method for assembling a charged particle beam source

Chamber elements and a method for placing a chamber at a load position

Method and system for evaluating objects

Near-field sensor height control

Evaluation system and a method for evaluating a substrate

Scanning an object using multiple mechanical stages

System and method for forming a sealed chamber

Slit valve with a pressurized gas bearing

Integrated system and method

System and method for forming a sealed chamber

Conductive element for electrically coupling an EUVL mask to a supporting chuck

System and method for inspecting a sample using landing lens

Chuck for supporting a wafer

KLA CORP

On-the-fly scatterometry overlay metrology target

Massive overlay metrology sampling with multiple measurement columns

Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices

Enhancing performance of overlay metrology

On-product overlay targets

Measurement of properties of patterned photoresist

Massive overlay metrology sampling with multiple measurement columns

Oscillating secondary stage for frame-mode overlay metrology

Enhancing performance of overlay metrology

In-situ process chamber chuck cleaning by cleaning substrate

In situ process chamber chuck cleaning by cleaning substrate

Systems and methods for chuck cleaning

Sensitive optical metrology in scanning and static modes

Overlay metrology using spectroscopic phase

Multi-stage, multi-zone substrate positioning systems

Systems and methods for improved metrology for semiconductor device wafers

System and method for isolation of specific fourier pupil frequency in overlay metrology

APPLIED MATERIALS INC

Air bearing-sealed micro-processing chamber

In situ module for particle removal from solid-state surfaces

Buffer station for wafer backside cleaning and inspection

Iced film substrate cleaning

KLA INSTR CORP

Process for measuring overlay misregistration during semiconductor wafer fabrication

Method and apparatus for the automated analysis of three-dimensional objects

ORAMIR SEMICONDUCTOR LTD

In situ module for particle removal from solid-state surfaces

Method and apparatus for local vectorial particle cleaning

KLA TENCOR CORP

Autofocusing apparatus and method for high resolution microscope system

LANGER MOSHE

High electron energy based overlay error measurement methods and systems

YOZMOT GFANOT INITIATIVE CT

Light vehicle for sporting and off-road biking