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Inventor
MIURA TAIKI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “MIURA TAIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
2 patents
US7633153B2
Dec 15, 2009
Semiconductor module
TOSHIBA KK
9 citations
82
US7514783B2
Apr 7, 2009
Semiconductor module
TOSHIBA KK
15 citations
82
TOKYO ELECTRON LTD
2 patents
US11404279B2
Aug 2, 2022
Etching method and substrate processing apparatus
TOKYO ELECTRON LTD
0 citations
59
US12560863B2
Feb 24, 2026
Etching method and plasma processing system
TOKYO ELECTRON LTD
0 citations
47