Inventor

KADOTA HISATSUNE

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KADOTA HISATSUNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

2 patents

US8749757B2Jun 10, 2014

Exposure apparatus, method for producing device, and method for controlling exposure apparatus

NIKON CORP4 citations83

US5161521ANov 10, 1992

Oscillation degree measuring apparatus

NIKON CORP11 citations70

MAGOME NOBUTAKA

1 patent

US8451424B2May 28, 2013

Exposure apparatus, method for producing device, and method for controlling exposure apparatus

MAGOME NOBUTAKA4 citations68