Inventor · disambiguated record

Megumi Murata

Also filed as: MURATA MEGUMI

1 granted patent·7 citations·filing 2010–2010

28Inventor score

Technology areasG03F

Files withKIKUCHI KATSUHIRO1

Top patents by PatentIndex Score

1 record

0185US8563214B2Radiation sensitive resin composition and method of forming an interlayer insulating filmKIKUCHI KATSUHIRO·Filed 2010·Granted Oct 22, 2013·7 cites·12 claims

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