Inventor
HUANG CHUANYONG
US5 patents
Patents
5 patentsUS10739276B2Aug 11, 2020
Minimizing filed size to reduce unwanted stray light
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US9970873B1May 15, 2018
System and method for luminescent tag based wafer inspection
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US10324045B2Jun 18, 2019
Surface defect inspection with large particle monitoring and laser power control
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US9726615B2Aug 8, 2017
System and method for simultaneous dark field and phase contrast inspection
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US10088345B1Oct 2, 2018
Haze and defect distribution and aperture configuration in surface metrology inspectors
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