Inventor
FONSECA JUNIOR JOSÉ NILTON
NL3 patents
Patents
3 patentsUS12292696B2May 6, 2025
Fluid purging system, projection system, illumination system, lithographic apparatus, and method
ASML NETHERLANDS BV0 citations53
US12411425B2Sep 9, 2025
Fluid purging system
ASML NETHERLANDS BV0 citations38
US10031428B2Jul 24, 2018
Gas flow optimization in reticle stage environment
ASML NETHERLANDS BV0 citations35