Inventor
JOO BEOMJUN
KR3 patents
Patents
3 patentsUS10732504B2Aug 4, 2020
Resist underlayer composition, and method of forming patterns using the composition
SAMSUNG SDI CO LTD1 citations59
US11698587B2Jul 11, 2023
Resist underlayer composition, and method of forming patterns using the composition
SAMSUNG SDI CO LTD0 citations48
US11493848B2Nov 8, 2022
Resist underlayer composition, and method of forming patterns using the composition
SAMSUNG SDI CO LTD0 citations48