Inventor

SHAJII ALI

US68 patents

⚠️ This page may combine multiple inventors who share the name “SHAJII ALI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHAJII ALI

MKS INSTR INC

Apparatus and method for pressure fluctuation insensitive mass flow control

Radio frequency power delivery system

Critical flow based mass flow verifier

Apparatus and method for pressure fluctuation insensitive mass flow control

Apparatus and method for calibration of mass flow controller

Apparatus and method for self-calibration of mass flow controller

Apparatus and method for mass flow controller with a plurality of closed loop control code sets

Apparatus and method for mass flow controller with network access to diagnostics

Pulsed mass flow delivery system and method

Apparatus and method for displaying mass flow controller pressure

Apparatus and method for pressure fluctuation insensitive mass flow control

Apparatus and method for mass flow controller with embedded web server

Apparatus and method for pressure fluctuation insensitive mass flow control

Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer

External volume insensitive flow verification

Thermal mass flow rate sensor having fixed bypass ratio

Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects

Reynolds number correction function for mass flow rate sensor

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Mass flow ratio system and method

Mass flow ratio system and method

Mass flow verifier with flow restrictor

System and method for controlling pressure in remote zones

Two phase flow sensor using tomography techniques

Apparatus and method for thermal management of a mass flow controller

Chemical ionization reaction or proton transfer reaction mass spectrometry

Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer

Semiconductor manufacturing gas flow divider system and method

Method and apparatus for conditioning a gas flow to improve a rate of pressure change measurement

Apparatus and method for thermal dissipation in a thermal mass flow sensor

Pressure regulation in remote zones

SHAJII ALI

Systems, methods and apparatus for choked flow element extraction

Apparatus and method for pressure fluctuation insensitive mass flow control

Apparatus and method for pressure fluctuation insensitive mass flow control

AXCELIS TECH INC

Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling

Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling

System and method for determining stray light in a thermal processing system

NAGARKATTI SIDDHARTH P

Radio frequency power delivery system

Measuring and controlling parameters of a plasma generator

EATON CORP

System and method for the real time determination of the in situ emissivity and temperature of a workpiece during processing

System and method for the real time determination of the in situ emissivity of a workpiece during processing

AMBROSINA JESSE E

Fluid flow measurement and control

Fluid flow measurement and control

ROBINSON TIMOTHY ROGER

Chemical ionization reaction or proton transfer reaction mass spectrometry

AXCELIS TECHNOLOGIES

System and method for controlling movement of a workpiece in a thermal processing system

IVENIX INC

Fluid flow measurement and control

FLODESIGN SONICS INC

Driver and control for variable impedence load

LAM RES CORP

Distributed, concentric multi-zone plasma source systems, methods and apparatus

CYNOSURE LLC

Non-invasive, uniform and non-uniform RF methods and systems related applications