Inventor
NAGASAKI HIDEAKI
JP3 patents
Patents
3 patentsUS11710614B2Jul 25, 2023
Light interference system and substrate processing apparatus
TOKYO ELECTRON LTD0 citations58
US11264267B2Mar 1, 2022
Apparatus for processing substrate and method for detecting a presence of a focus ring on a stage
TOKYO ELECTRON LTD0 citations46
US11920928B2Mar 5, 2024
System and method for correcting optical path length measurement errors
TOKYO ELECTRON LTD0 citations45