Inventor

COWE ANDREW

US11 patents

⚠️ This page may combine multiple inventors who share the name “COWE ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHAJII ALI

4 patents

US9449793B2Sep 20, 2016

Systems, methods and apparatus for choked flow element extraction

SHAJII ALI469 citations97

US10283325B2May 7, 2019

Distributed multi-zone plasma source systems, methods and apparatus

SHAJII ALI1 citations61

US8999104B2Apr 7, 2015

Systems, methods and apparatus for separate plasma source control

SHAJII ALI2 citations61

US9155181B2Oct 6, 2015

Distributed multi-zone plasma source systems, methods and apparatus

SHAJII ALI1 citations51

MKS INSTR INC

3 patents

US7914603B2Mar 29, 2011

Particle trap for a plasma source

MKS INSTR INC2 citations59

US11664197B2May 30, 2023

Method and apparatus for plasma generation

MKS INSTR INC1 citations56

US12159765B2Dec 3, 2024

Method and apparatus for plasma generation

MKS INSTR INC0 citations50

LAM RES CORP

2 patents

US9967965B2May 8, 2018

Distributed, concentric multi-zone plasma source systems, methods and apparatus

LAM RES CORP2 citations69

US10424460B2Sep 24, 2019

Systems, methods and apparatus for choked flow element extraction

LAM RES CORP0 citations51

CHEN XING

1 patent

US9275839B2Mar 1, 2016

Toroidal plasma chamber for high gas flow rate process

CHEN XING13 citations83

BENZERROUK SOUHEIL

1 patent

US8692466B2Apr 8, 2014

Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator

BENZERROUK SOUHEIL3 citations59