Inventor
NAGARKATTI SIDDHARTH P
US21 patents
⚠️ This page may combine multiple inventors who share the name “NAGARKATTI SIDDHARTH P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
10 patentsUS7764140B2Jul 27, 2010
Radio frequency power delivery system
MKS INSTR INC139 citations97
US7615120B2Nov 10, 2009
Pulsed mass flow delivery system and method
MKS INSTR INC64 citations95
US7829353B2Nov 9, 2010
Pulsed mass flow delivery system and method
MKS INSTR INC18 citations90
US7628860B2Dec 8, 2009
Pulsed mass flow delivery system and method
MKS INSTR INC29 citations90
US6986359B2Jan 17, 2006
System and method for controlling pressure in remote zones
MKS INSTR INC18 citations84
US6857323B1Feb 22, 2005
Two phase flow sensor using tomography techniques
MKS INSTR INC14 citations84
US7477711B2Jan 13, 2009
Synchronous undersampling for high-frequency voltage and current measurements
MKS INSTR INC18 citations77
US7072743B2Jul 4, 2006
Semiconductor manufacturing gas flow divider system and method
MKS INSTR INC10 citations74
US8037896B2Oct 18, 2011
Pressure regulation in remote zones
MKS INSTR INC4 citations62
US7120542B2Oct 10, 2006
Flow monitoring system
MKS INSTR INC6 citations58
SHAJII ALI
5 patentsUS9449793B2Sep 20, 2016
Systems, methods and apparatus for choked flow element extraction
SHAJII ALI469 citations97
US10283325B2May 7, 2019
Distributed multi-zone plasma source systems, methods and apparatus
SHAJII ALI1 citations61
US8999104B2Apr 7, 2015
Systems, methods and apparatus for separate plasma source control
SHAJII ALI2 citations61
US9155181B2Oct 6, 2015
Distributed multi-zone plasma source systems, methods and apparatus
SHAJII ALI1 citations51
US8689822B2Apr 8, 2014
Pressure regulation in remote zones
SHAJII ALI1 citations51
NAGARKATTI SIDDHARTH P
3 patentsUS8633782B2Jan 21, 2014
Radio frequency power delivery system
NAGARKATTI SIDDHARTH P64 citations96
US8710926B2Apr 29, 2014
Radio frequency power delivery system
NAGARKATTI SIDDHARTH P64 citations94
US8624501B2Jan 7, 2014
Measuring and controlling parameters of a plasma generator
NAGARKATTI SIDDHARTH P50 citations93