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Inventor

ENTLEY WILLIAM R

US8 patents
⚠️ This page may combine multiple inventors who share the name “ENTLEY WILLIAM R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHAJII ALI

4 patents
US9449793B2Sep 20, 2016

Systems, methods and apparatus for choked flow element extraction

SHAJII ALI469 citations97
US10283325B2May 7, 2019

Distributed multi-zone plasma source systems, methods and apparatus

SHAJII ALI1 citations61
US8999104B2Apr 7, 2015

Systems, methods and apparatus for separate plasma source control

SHAJII ALI2 citations61
US9155181B2Oct 6, 2015

Distributed multi-zone plasma source systems, methods and apparatus

SHAJII ALI1 citations51

NOVELLUS SYSTEMS INC

2 patents
US6872323B1Mar 29, 2005

In situ plasma process to remove fluorine residues from the interior surfaces of a CVD reactor

NOVELLUS SYSTEMS INC104 citations96
US7479191B1Jan 20, 2009

Method for endpointing CVD chamber cleans following ultra low-k film treatments

NOVELLUS SYSTEMS INC20 citations87

VERSUM MAT US LLC

1 patent
US12441747B2Oct 14, 2025

Silicon compounds and methods for depositing films using same

VERSUM MAT US LLC0 citations51

LAM RES CORP

1 patent
US10424460B2Sep 24, 2019

Systems, methods and apparatus for choked flow element extraction

LAM RES CORP0 citations51