Inventor
HOLLINGSWORTH JOEL
US5 patents
⚠️ This page may combine multiple inventors who share the name “HOLLINGSWORTH JOEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS10431467B2Oct 1, 2019
Module including metallized ceramic tubes for RF and gas delivery
LAM RES CORP14 citations91
US10147610B1Dec 4, 2018
Substrate pedestal module including metallized ceramic tubes for RF and gas delivery
LAM RES CORP27 citations91
US11469084B2Oct 11, 2022
High temperature RF connection with integral thermal choke
LAM RES CORP6 citations83
US12243725B2Mar 4, 2025
High temperature RF connection with integral thermal choke
LAM RES CORP1 citations61