Inventor

WANG ZHONGHUI ALEX

US4 patents

⚠️ This page may combine multiple inventors who share the name “WANG ZHONGHUI ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6911136B2Jun 28, 2005

Method for regulating the electrical power applied to a substrate during an immersion process

APPLIED MATERIALS INC12 citations82

US7109111B2Sep 19, 2006

Method of annealing metal layers

APPLIED MATERIALS INC7 citations71

LAM RES CORP

2 patents

US7709400B2May 4, 2010

Thermal methods for cleaning post-CMP wafers

LAM RES CORP2 citations62

US7884017B2Feb 8, 2011

Thermal methods for cleaning post-CMP wafers

LAM RES CORP0 citations51